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过滤器
应特格ENTEGRIS气体过滤器,WGMXMBSS2现货供应!
  • 应特格ENTEGRIS气体过滤器,WGMXMBSS2现货供应!

  • 产品分类:Entegris
  • ENTEGRIS气体过滤器
产品订购热线:18020505162

应特格ENTEGRIS气体过滤器,WGMXMBSS2现货供应!

应特格ENTEGRIS气体过滤器,WGMXMBSS2现货供应!

应特格ENTEGRIS气体过滤器,WGMXMBSS2现货供应!

 

 

 

APPLICATIONSWafergard® MAX In-line PTFE Gas Filters Applications

  • Compatible with all classes of semiconductor process gases

  • Compatible with general nitrogen and CDA applications

 

 

 

SPECIFICATIONS

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 Performance Data

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Product Specifications

Materials Filter element Hydrophobic PTFE membrane supported by molded PFA structures
  Housing Electropolished low sulfur 316L stainless housing
Downstream cleanliness Particles Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm
  Volatiles (Silver) <10 ppb H2O and O2. Below LDL THC (lower detection limit is 5 ppb)
Removal rating ≥0.0015 μm
Surface finish interior WGMX (Bronze) MB XXXX ≤20 μin Ra
  WGMX (Silver/Bronze Plus) MS XXX/XXX ≤7 μin Ra
Helium leak rating Qualified 2 x 10-10 atm-cc/sec
  Tested 1 x 10-9 atm-cc/sec
Operating conditions
 
Maximum inlet pressure
 
Silver and Bronze Plus 1⁄4" and 1⁄2" VCR® compatible fittings: 7.0 MPa (70 bar, 1015 psig)
    Bronze 1⁄4" and 1⁄2" VCR compatible fittings: 6.0 MPa (60 bar, 870 psig)
    Bronze and Bronze Plus 1⁄4", 3⁄8" and 1⁄2" Swagelok® compatible fitting: 6.0 MPa (60 bar, 870 psig)
  Maximum forward differential pressure 7 bar (102 psid)
  Maximum reverse differential pressure 2.5 bar (36 psid)
  Maximum operating temperature 120°C (248°F)
Flow rating Refer to performance data
Warranty Bronze 1 year
  Silver 3 years
Particle retention Greater than 99.9999999% (9 LRV) removal of all particles (referenced at the most penetrating particle size)

 

 

 Wafergard MAX In-line PTFE Gas Filters
SLIDE DETAILS.
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These in-line PTFE gas filters are compatible with high-purity gases and provide superior particulate filtration in ultrapure gas applications as well as general nitrogen and CDA applications.
PTFE filter element excels in ultrapure applications 
Designed for high-flow and low-delta pressure applications 
For use with inert and reactive gases, including ozone 
Pre-conditioned for fast startup (silver only) 
PART NUMBERS
Wafergard MAX In-line PTFE Gas Filters Part Numbers
PART NUMBER FITTING SIZE AND TYPE LENGTH
WGMXMBPRF2 1/4" male VCR inlet, 1/4" female VCR outlet 141.2 mm (5.6")
WGMXMBRR2 1/4" male VCR127 mm (5.00")
WGMXMBRR4 1/2" male VCR127 mm (5.00")
WGMXMBSS2 1/4" Swagelok112.7 mm (4.44")
WGMXMBSS3 3/8" Swagelok117.9 mm (4.64)
WGMXMBSS4 1/2" Swagelok118.7 mm (4.67")
WGMXMPRR2 1/4" male VCR127 mm (5.00")
WGMXMPRR4 1/2" male VCR127 mm (5.00")
WGMXMPSS2 1/4" Swagelok112.7 mm (4.44")
WGMXMPSS3 3/8" Swagelok117.9 mm (4.64)
WGMXMSBW2 1/4" Butt weld tube 133.4 mm (5.25")
WGMXMSBW3 3/8" butt weld tube 133.4 mm (5.25")
WGMXMSBW4 1/2" Butt weld tube 133.4 mm (5.25")
WGMXMSRR2 1/4" male VCR127 mm (5.00")
WGMXMSRR4 1/2" male VCR127 mm (5.00")
  

 

 

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