Wafergard® III NF-30 In-line Gas Filters，英特格ENTEGRIS气体过滤器WG3NS6SL2
Wafergard® III NF-30 In-line Gas Filters，英特格ENTEGRIS气体过滤器WG3NS6SL2
Wafergard® III NF-30 In-line Gas Filters，英特格ENTEGRIS气体过滤器WG3NS6SL2
Offer superior particulate filtration for ultrapure gas system filtration.
All metal construction provides the cleanest, most efficient all-metal filters available
Patented nickel filter membrane offers superior corrosion resistance and excellent chemical compatibility
Innovative housing design helps eliminate outgassing and reduces drydown time
Ideal for high-temperature and dynamic-pressure applications
Typically used for flows up to 30 slpm
APPLICATIONS
Wafergard
III NF-30 In-line Gas Filters Applications
Bulk gas delivery
Photolithography
Deposition
Dry etch
Ion implantation
Note: Not recommended for use with CO, O3, and low level hydride dopant gases.
SPECIFICATIONS
Drawings
Performance Data
Product Specifications
| Materials |
Filter membrane |
Patented, sintered nickel |
| |
Housing |
Electropolished F20 stainless steel |
| Downstream cleanliness |
Particles* |
<0.03 particles/Liter (<1 particle/ft3) >0.01 µm |
| |
Volatiles** |
Volatile outgassing of H2O, O2, and THC is below detectable limits (by RGA and FID at room temperature) |
| Removal rating |
≥0.0015 µm |
|
| Surface finish interior |
≤5 µin Ra |
|
| Helium leak rate |
Qualified |
2x10-10 atm cc/sec |
| |
Tested |
1x10-9 atm cc/sec |
| Maximum operating conditions |
Maximum inlet pressure: |
70 bar (1000 psi) @ 100°C (212°F) |
| Maximum forward/reverse differential pressure: |
10 bar (150 psid) |
| Maximum operating temperature |
Inert gases |
400°C (752°F) at 35 bar (500 psi) |
| Corrosive and reactive gases |
50°C (122°F) at 70 bar (1000 psi) |
| Warranty |
5 year |
|
| Particle retention |
Greater than 99.9999999% (9 LRV) removal of all particles at 30 slpm |
| |
Greater than 99.9999% removal of all particles at 75 slpm (referenced at the most penetrating particle size) |
| Flow rate |
Refer to flow curve |
|
*Particle cleanliness qualified following SEMASPEC Test Method for Particle Shedding (#93021511A-STD)
**Volatile cleanliness qualified following SEMASPEC Test Methods for: THC Contribution (#90120396B-STD), Moisture Contribution (#90120397B-STD), Oxygen Contribution (#90120398B-STD)
PART NUMBERS
Wafergard III NF-30 In-line Gas Filters Part Numbers
PART NUMBER FITTING SIZE AND TYPE LENGTH
WG3NS3FF2 1/4" Gasket seal (compatible with VCR fitting) female inlet/outlet 58.4 mm (2.30")
WG3NS3JJ2 1/4" Butt weld tube 28.4 mm (1.12")
WG3NS3RF2 1/4" Polarized gasket seal (compatible with VCR fitting) male inlet/female outlet 71.1 mm (2.80")
WG3NS6RR2 1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet 84.1 mm (3.31")
WG3NS6SL2 1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet, short Version 58.7 mm (2.31")
