Entegris、Mykrolis、Millipore纯化器，GPUS2500FIX04R00CA
GateKeeper
GPU Gas Purifiers
GateKeeper GPU series of purifiers were designed to improve process gas consistency, lifetime and outlet purity.
Purity to ppt levels
Wide range of gas compatibility, including corrosive gases such as Cl2, HBr, HCl, CF4, SO2, SF6
Low pressure drop across the purifier
CE certified to the pressure equipment directive PED and manufactured in an ISO 9001-2000 facility
Regenerable – eliminates disposal issues and costs
Long lifetime – improved cost of ownership
Use ambient temperature purification
APPLICATIONS
GateKeeper GPU Gas Purifiers Applications
Bulk gas delivery
Photolithography
Epitaxy
Dry etch
Wafer growing
Deposition
REFERENCE MATERIALS
