Detectable Gases
Gas Name Chemical Formula Range Sensor Part Number
Ammonia NH3 0 - 100ppm MIDAS-S-NH3
Arsine AsH3 0 - 0.2ppm MIDAS-S-ASH
Boron Trichloride BCl3 0 - 8.0ppm MIDAS-S-HCL
Boron Trifluoride BF3 0 - 8.0ppm MIDAS-S-HFX
Boron Trifluoride (Low Level) BF3 0 - 2.0ppm MIDAS-S-HFL
Bromine Br2 0 - 0.4ppm MIDAS-S-BR2
Carbon Dioxide CO2 0 - 2.0% vol MIDAS-S-CO2
Carbon Monoxide CO 0 - 100ppm MIDAS-S-COX
Chlorine Cl2 0 - 2.0ppm MIDAS-S-HAL
Chlorine Dioxide ClO2 0 - 0.4ppm MIDAS-S-BR2
Chlorine Trifluoride ClF3 0 - 0.4ppm MIDAS-S-SF4
Diborane B2H6 0 - 0.4ppm MIDAS-S-HYD
Dichlorosilane H2SiCl2 0 - 8.0ppm MIDAS-S-HCL
Difluoromethane CH2F2 0 - 120ppm MIDAS-S-CFX
Disilane Si2H6 0 - 20ppm MIDAS-S-SHX
Fluorine F2 0 - 4.0ppm MIDAS-S-HAL
Germane GeH4 0 - 0.8ppm MIDAS-S-HYD
Hexafluorobutadiene C4F6 0 - 40ppm MIDAS-S-CFX
Hydrogen (% LEL)* H2 0 - 100% LEL MIDAS-S-LEL
Hydrogen (ppm) H2 0 - 1000ppm MIDAS-S-H2X
Hydrogen Bromide HBr 0 - 8.0ppm MIDAS-S-HCL
Hydrogen Chloride HCl 0 - 8.0ppm MIDAS-S-HCL
Hydrogen Cyanide HCN 0 - 20ppm MIDAS-S-HCN
Hydrogen Fluoride HF 0 - 12ppm MIDAS-S-HFX
Hydrogen Fluoride (Low Level) HF 0 - 2.0ppm MIDAS-S-HFL
Hydrogen Sulphide H2S 0 - 40ppm MIDAS-S-H2S
Hydrogen Sulphide (High Level) H2S 0 - 100ppm MIDAS-S-HSH
Methane (% LEL)* CH4 0 - 100% LEL MIDAS-S-LEL
Methyl Fluoride CH3F 0 - 60ppm MIDAS-S-CFX
Nitrogen Dioxide NO2 0 -12ppm MIDAS-S-NO2
Nitrogen Oxide NO 0 - 100ppm MIDAS-S-NOX
Nitrogen Trifluoride NF3 0 - 40ppm MIDAS-S-HFX
Octofluorocyclopentene C5F8 0 - 40ppm MIDAS-S-CFX
Oxygen Proficiency & Deficiency O2 0 - 25% vol MIDAS-S-O2X
Ozone O3 0 - 0.4ppm MIDAS-S-O3X
Phosphine PH3 0 - 1.2ppm MIDAS-S-PH3
Phosphorous Oxychloride POCl3 0 - 0.4ppm MIDAS-S-POC
Silane SiH4 0 - 20ppm MIDAS-S-SHX
Silane (low level) SiH4 0 - 2.0ppm MIDAS-S-SHL
Sulphur Dioxide SO2 0 - 8.0ppm MIDAS-S-SO2
Sulphur Hexafluoride SF6 0 - 8000ppm MIDAS-S-CFX
Sulphur Tetrafluoride SF4 0 - 0.4ppm MIDAS-S-SF4
Tetra Ethyl Ortho Silicate TEOS 0 - 40ppm MIDAS-S-TEO
Tungsten Hexafluoride WF6 0 - 12ppm MIDAS-S-HFX
Tungsten Hexafluoride (Low Level) WF6 0 - 2.0ppm MIDAS-S-HFL
