英特格ENTEGRIS纯化器，GPUS2500FHX04R00CR
GateKeeper
GPU
TX Media Gas Purifiers
Superior purity control
Entegris’ GateKeeper GPU gas purifiers were designed
to improve purity consistency, lifetime, and final purity in
microelectronics applications where high-purity gas is critical.
Leveraging our expertise in material science, we have developed
a new generation of TX gas purification products that deliver
unsurpassed value and performance.
APPLICATIONS
—
• Semiconductor
• Data storage
• Flat panel display
• LED
• Solar
FEATURES & BENEFITS
—
Process control and protection Purity control below part-per-billion (ppb) levels
Low pressure drop through the purifier
CE certified to the Pressure Equipment Directive (PED)
Manufactured in an ISO 9001:2015 facility
Cost effective Regenerable – eliminates disposal issues and costs
Long lifetime — improves cost of ownership
Safe and simple to use Uses ambient temperature purification — no heat or power
required to operate
Insensitive to orientation (horizontal / vertical)
GENERAL SPECIFICATIONS
—
Gases purified CDA, O2, N2, Ar, He, Ne, Kr, Xe, H2, CO2, C2H6, C3H8, C4H10, C2H2, C3H6, C2H4
Impurities removed CONTAMINANTS OUTLET PURITY
Condensable Organics >C6 <1 pptV
Non-condensable Organics >C3 < 5 pptV
Refractory compounds (as HMDSO) <1 pptV
C3H7NO (DMF) <100 pptV
Outlet particle filter Wafergard — 316 stainless steel membrane, 20 μm or 0.0015 μm
Lifetime One year with 1 ppm inlet challenge of toluene with flow rates shown
on the next page.
The lifetime varies with the inlet impurities and flow rate. Contact Entegris for
application specific lifetime calculations.
Regenerable Yes
Dangerous goods (DG) No
Operating temperature 0° – 65°C (32° – 149°F)
Leak rating 1 × 10-9 atm ccc of He
Materials of construction Housing: 316L stainless steel
Certification CE certified to the Pressure Equipment Directive (PED)
Designed in accordance with ASME
OPERATING SPECIFICATIONS
—
Model
Maximum
flow rate
Lifetime is 1
year at this
flow rate,
with 1 ppm
toluene
Maximum
operating
pressure –
purifier only
Maximum
operating
pressure –
purifier with
options
Pressure drop,
with 20 μm
particle filter*
Pressure
drop, with
0.0015 μm
particle filter*
GPU 15 0.5 slpm 0.3 slpm 2,000 psig 250 psig – 1.0 psid
GPU 35 1 slpm 0.5 slpm 1,400 psig 250 psig – 0.3 psid
GPU 70 5 slpm 4.0 slpm 1,400 psig 250 psig – 0.5 psid
GPU 80 10 slpm 5.0 slpm 1,400 psig 250 psig – 1.0 psid
GPU 100 20 slpm 7.4 slpm 1,000 psig 250 psig – 16.7 psid
GPU 200 20 slpm 12.0 slpm 800 psig 250 psig – 0.7 psid
GPU 300 50 slpm 18.0 slpm 800 psig 250 psig – 1.3 psid
GPU 500 75 slpm 36.0 slpm 600 psig 250 psig – 1.3 psid
GPU 700 120 slpm 50.0 slpm 600 psig 250 psig – 1.8 psid
GPU 2500 4R 300 slpm 170.0 slpm 505 psig 250 psig – 5.0 psid
GPU 2500 8R 500 slpm 170.0 slpm 505 psig 250 psig – 5.6 psid
GPU 3000 500 slpm 200.0 slpm 505 psig 250 psig – 5.6 psid
GPU 5000 500 slpm 320.0 slpm 505 psig 250 psig – 7.0 psid
GPU 10M 8R 1,000 slpm 640.0 slpm 370 psig 250 psig – 5.8 psid
GPU 10M 12R 1,000 slpm 640.0 slpm 370 psig 250 psig – 8.0 psid
GPU 13M 12R 2,000 slpm 820.0 slpm 370 psig 250 psig 2.0 psid –
GPU 13M 16R 2,500 slpm 820.0 slpm 370 psig 250 psig 3.0 psid –
GPU 17M 12R 2,000 slpm 1,020.0 slpm 370 psig 250 psig 2.0 psid –
GPU 17M 16R 2,500 slpm 1,020.0 slpm 370 psig 250 psig 3.0 psid –
GPU 20M 12R 2,000 slpm 1,260.0 slpm 370 psig 250 psig – 19.0 psid
GPU 20M 16R 2,500 slpm 1,260.0 slpm 370 psig 250 psig – 19.0 psid
FACILITY SPECIFICATIONS
—
GPU model
Connection
size (VCR)
Inlet/outlet
connection type
(VCR)
Outside
Diameter (OD)
Overall length
(OAL)
Approximate
weight
GPU 15 1/4" Male/male 25.4 mm (1.0") 84 mm (3.3") 0.2 kg (0.4 lbs)
GPU 35 1/4" Male/male 38.1 mm (1.5") 84 mm (3.3") 0.3 kg (0.7 lbs)
GPU 70 1/4" Male/male 38.1 mm (1.5") 114 mm (4.5") 0.3 kg (0.7 lbs)
GPU 80 1/4" Male/male 38.1 mm (1.5") 127 mm (5.0") 0.3 kg (0.7 lbs)
GPU 100 1/4” Male/male N/A 84 mm (3.3") 0.9 kg (2.0 lbs)
GPU 200 1/4" Male/male 50.8 mm (2.0") 157 mm (6.2") 0.9 kg (2.0 lbs)
GPU 300 1/4" Male/male 50.8 mm (2.0") 208 mm (8.2") 1.1 kg (2.5 lbs)
GPU 500 1/4" Male/male 76.2 mm (3.0") 201 mm (7.9") 1.8 kg (4.0 lbs)
GPU 700 1/4" Male/male 76.2 mm (3.0") 254 mm (10.0") 2.5 kg (5.5 lbs)
GPU 2500 4R 1/4" Male/male 101.6 mm (4.0") 439 mm (17.3") 6.8 kg (15 lbs)
GPU 2500 8R 1/2" Male/male 101.6 mm (4.0") 445 mm (17.5") 6.8 kg (15 lbs)
GPU 3000 1/2" Male/male 101.6 mm (4.0") 508 mm (20.0") 7.3 kg (16 lbs)
GPU 5000 1/2" Male/male 101.6 mm (4.0") 785 mm (30.9") 10.0 kg (22 lbs)
GPU 10M 8R 1/2" Male/male 152.4 mm (6.0") 737 mm (29.0") 20 kg (44 lbs)
GPU 10M 12R 3/4" Male/male 152.4 mm (6.0") 749 mm (29.5") 21.8 kg (48 lbs)
GPU 13M 12R 3/4" Male/male 152.4 mm (6.0") 892 mm (35.1") 24.9 kg (55 lbs)
GPU 13M 16R 1" Male/male 152.4 mm (6.0") 899 mm (35.4") 24.9 kg (55 lbs)
GPU 17M 12R 3/4" Male/male 152.4 mm (6.0") 1085 mm (42.7") 29.5 kg (65 lbs)
GPU 17M 16R 1" Male/male 152.4 mm (6.0") 1090 mm (42.9") 29.5 kg (65 lbs)
GPU 20M 12R 3/4" Male/male 152.4 mm (6.0") 1290 mm (50.8") 34 kg (75 lbs)
GPU 20M 16R 1" Male/male 152.4 mm (6.0") 1296 mm (51.0") 34 kg (75 lbs)
5
FACILITY SPECIFICATIONS, PURIFIERS WITH ISOLATION VALVES
—
GPU model
Connection
size (VCR)
Inlet/outlet
connection type
(VCR)
Outside
Diameter (OD)
Overall length
(OAL) with valves
Approximate
weight with valves
GPU 15 1/4" Female/female 25.4 mm (1.0") 234 mm (9.2") 1.1 kg (2.4 lbs)
GPU 35 1/4" Female/female 38.1 mm (1.5") 234 mm (9.2") 1.2 kg (2.6 lbs)
GPU 70 1/4" Female/female 38.1 mm (1.5") 264 mm (10.4") 1.3 kg (2.9 lbs)
GPU 80 1/4" Female/female 38.1 mm (1.5") 277 mm (10.9") 1.3 kg (2.9 lbs)
GPU 100 1/4” Female/female N/A 234 mm (9.2") 1.3 kg (2.9 lbs)
GPU 200 1/4" Female/female 50.8 mm (2.0") 307 mm (12.1") 1.7 kg (3.7 lbs)
GPU 300 1/4" Female/female 50.8 mm (2.0") 358 mm (14.1") 1.8 kg (3.8 lbs)
GPU 300 (GC 300) 1/4" Female/male 83.8 mm (3.3") 401.3 mm (15.8") 2.3 kg (5.1 lbs)
GPU 500 1/4" Female/female 76.2 mm (3.0") 351 mm (13.8") 2.7 kg (6.0 lbs)
GPU 700 1/4" Female/female 76.2 mm (3.0") 404 mm (15.9") 4.4 kg (9.6 lbs)
GPU 2500 4R 1/4" Female/female 101.6 mm (4.0") 592 mm (23.3") 6.8 kg (15 lbs)
GPU 2500 8R 1/2" Female/female 101.6 mm (4.0") 714 mm (28.1") 8.0 kg (17.7 lbs)
GPU 3000 1/2" Female/female 101.6 mm (4.0") 777 mm (30.6") 8.5 kg (18.7 lbs)
GPU 5000 1/2" Female/female 101.6 mm (4.0") 1054 mm (41.5") 12.5 kg (27.6 lbs)
GPU 10M 8R 1/2" Female/male 152.4 mm (6.0") 970 mm (38.2") 22.5 kg (49.6 lbs)
GPU 10M 12R 3/4" Female/female 152.4 mm (6.0") 1125 mm (44.3") 24.9 kg (55.0 lbs)
GPU 13M 12R 3/4" Female/female 152.4 mm (6.0") 1270 mm (50.0") 28.1 kg (62.0 lbs)
GPU 13M 16R 1" Female/female 152.4 mm (6.0") 1308 mm (51.5") 29.5 kg (65.0 lbs)
GPU 17M 12R 3/4" Female/female 152.4 mm (6.0") 1461 mm (57.5") 32.7 kg (72.0 lbs)
GPU 17M 16R 1" Female/female 152.4 mm (6.0") 1499 mm (59.0") 34.0 kg (75.0 lbs)
GPU 20M 12R 3/4" Female/female 152.4 mm (6.0") 1666 mm (65.6") 37.2 kg (82.0 lbs)
GPU 20M 16R 1" Female/female 152.4 mm (6.0") 1705 mm (67.1") 38.6 kg (85.0 lbs)
