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过滤器
Entegris英特格Optimizer® DI Filters过滤器CBUZ8S0P1，CHUZ8S0P1
 
 

  • Entegris英特格Optimizer® DI Filters过滤器CBUZ8S0P1，CHUZ8S0P1

  • 产品分类：Entegris
产品订购热线：18020505162
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Product Specifications

Materials Membrane: UPE*
  Supports, core, sleeve: HDPE
  Housing: PP
Membrane area DI 1800 cm² (1.94 ft²)
  DI-L 3600 cm² (3.88 ft²)
  DI-L (20 nm) 2100 cm² (2.26 ft²)
Retention ratings DI, DI-L 0.2, 0.1, 0.05 µm, 20 nm
Fittings Available in a wide range of fittings including Super Type Pillar® fittings, compression seal (Swagelok® compatible fittings) and Flaretek® fittings.
Operating conditions Maximum inlet pressure 0.345 MPa (3.45 bar, 50 psi, 3.52 kg/cm²) @ 25°C (77°F)
  Maximum forward/reverse differential pressure 0.345 MPa (3.45 bar, 50 psi, 3.52 kg/cm²) @ 25°C (77°F)
    0.28 MPa (2.8 bar, 40 psi, 2.8 kg/cm²) @ 25°C (77°F)
  Operating temperature

60°C (140°F)

 

 

 

Optimizer® DI Filters Part Numbers

Part Number Lithography Technology Length Retention Rating Connection
CBUG0S0F1 KrF Short Capsule 0.2 µm 1/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting
CBUG0S0P1 KrF Short Capsule 0.2 µm 1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting
CBUG0S0S1 KrF Short Capsule 0.2 µm 1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CBUG2L0P1 KrF Long Capsule 0.2 µm 1/2" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fitting
CBUG3L0P1 KrF Long Capsule 0.2 µm 3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings
CBUG3L0S1 KrF Long Capsule 0.2 µm 3/8" inlet/outlet, 1/4" vent/drain, compression fittings
CBUG6S0P1 KrF Short Capsule 0.2 µm 6 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings
CBUG8L0P1 KrF Long Capsule 0.2 µm 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings
CBUG8S0P1 KrF Short Capsule 0.2 µm 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings
CBUV0L0P1 KrF Long Capsule 0.1 µm 1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting
CBUV0S0F1 KrF Short Capsule 0.1 µm 1/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting
CBUV0S0P1 KrF Short Capsule 0.1 µm 1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting
CBUV0S0S1 KrF Short Capsule 0.1 µm 1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CBUV2L0P1 KrF Short Capsule 0.1 µm 1/2" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fitting
CBUV3L0F1 KrF Short Capsule 0.1 µm 3/8" inlet/outlet, 1/4" vent/drain Flaretek® fittings
CBUV3L0P1 KrF Long Capsule 0.1 µm 3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings
CBUV3L0S1 KrF Long Capsule 0.1 µm 3/8" inlet/outlet, 1/4" vent/drain, compression fittings
CBUV3S0P1 KrF Short Capsule 0.1 µm 3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings
CBUV6S0P1 KrF Short Capsule 0.1 µm 6 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings
CBUV8L0P1 KrF Long Capsule 0.1 µm 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings
CBUV8S0P1 KrF Short Capsule 0.1 µm 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings
CBUX3L0P1 ArF Long Capsule 20 nm 3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings
CBUX8L0P1 ArF Long Capsule 20 nm 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings
CBUX8S0P1 ArF Short Capsule 20 nm 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings
CBUZ0L0S1 KrF Long Capsule 0.05 µm 1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CBUZ0S0F1 KrF Short Capsule 0.05 µm 1/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting
CBUZ0S0P1 KrF Short Capsule 0.05 µm 1/4" inlet/outlet, 1/4" vent/drain, Super type Pillar® fitting
CBUZ0S0S1 KrF Short Capsule 0.05 µm 1/4" inlet/outlet, 1/4" vent/drain, compression fittings
CBUZ2L0P1 KrF Long Capsule 0.05 µm 1/2" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fitting
CBUZ3L0F1 KrF Long Capsule 0.05 µm 3/8" inlet/outlet, 1/4" vent/drain Flaretek® fittings
CBUZ3L0P1 KrF Long Capsule 0.05 µm 3/8" inlet/outlet, 1/4" vent/drain, Super Type Pillar® fittings
CBUZ3L0S1 KrF Long Capsule 0.05 µm 3/8" inlet/outlet, 1/4" vent/drain, compression fittings
CBUZ3L0X1 KrF Long Capsule 0.05 µm —
CBUZ6S0P1 KrF Short Capsule 0.05 µm 6 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings
CBUZ8L0P1 KrF Long Capsule 0.05 µm 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings
CBUZ8S0P1 KrF Short Capsule 0.05 µm 8 mm inlet/outlet, 4 mm vent/drain, Super Type Pillar® fittings
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